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Proceedings Paper

Optical element surface defect measurement with lensless digital holographic microscopy
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Paper Abstract

In order to measure optical element surface defects accurately, we proposed a fast and nondestructive microscopic observation method based on lensless digital holography technology. The basic principle of lensless digital holographic microscopy imaging technology based on spherical wave is introduced. CCD was adapted as photoelectric converter and almost-perfect spherical reference wave can be acquired by using optical fiber of high numerical aperture. The wave aberration induced by the defects is effectively recorded and then the accurate reconstruction result of the defect structure is obtained. This method will have potential application in the quantitative measurement for the defects on optical surface and is helpful for the further research and understanding the influence of surface defects on high-power laser system.

Paper Details

Date Published: 2 November 2018
PDF: 7 pages
Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 108181J (2 November 2018); doi: 10.1117/12.2500183
Show Author Affiliations
Yan Chen, Guangzhou Bosma Technology Co., Ltd. (China)
Xiaojin Yu, Guangzhou Bosma Technology Co., Ltd. (China)
Lulu Yan, Guangzhou Bosma Technology Co., Ltd. (China)


Published in SPIE Proceedings Vol. 10818:
Holography, Diffractive Optics, and Applications VIII
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

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