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Proceedings Paper

Surface measurement through transparent medium using Linnik type white-light spectral interferometer
Author(s): Tong Guo; Qianwen Weng; Zhuo Chen; Xing Fu; Xiaotang Hu
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Paper Abstract

According to the requirement for high precision surface measurement in the special conditions, a Linnik type measuring system with long working distance was built up based on white-light microscopic spectral interferometry. The influence of the transparent medium on the interferogram was minimized by the optical path compensation in the reference beam of the interferometer. Surface profile and film thickness can be obtained accurately after the optical path compensation and nonlinear phase error correction. The measuring results with and without transparent medium were compared to show the feasibility of the proposed methods, including displacement, profile and film thickness measurement. And experiments on the surface with complex profile and the film standard showed that the system still kept the nanoscale accuracy through transparent medium.

Paper Details

Date Published: 24 July 2018
PDF: 9 pages
Proc. SPIE 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 1082705 (24 July 2018); doi: 10.1117/12.2500066
Show Author Affiliations
Tong Guo, Tianjin Univ. (China)
Qianwen Weng, Tianjin Univ. (China)
Zhuo Chen, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Xiaotang Hu, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 10827:
Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
Yingjie Yu; Chao Zuo; Kemao Qian, Editor(s)

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