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Proceedings Paper

Proton-diffused channel waveguides on Y-cut LiNbO3 using a self-aligned SiO2-cap diffusion method
Author(s): Yung-Sung Son; Hyung Jae Lee; Sang-Yoon Yi; Sang-Yung Shin
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Paper Abstract

We report on proton-diffused channel waveguides on Y-cut LiNbO3 fabricated by using pure benzoic acid for proton exchange and a self-aligned Si02 cap for diffusion. They do not exhibit surface damage since the rate of initial proton exchange can be lowered due to the proton conserving property of a selfaligned Si02 cap. The electrooptic property of the waveguide is investigated by the cutoff modulation of a channel waveguide. The proton diffusion with a self-aligned Si02 cap is proved to render good Y-cut LiNbO3 channel waveguides.

Paper Details

Date Published: 1 February 1991
PDF: 7 pages
Proc. SPIE 1374, Integrated Optics and Optoelectronics II, (1 February 1991); doi: 10.1117/12.24951
Show Author Affiliations
Yung-Sung Son, Korea Advanced Institute of Science and Technology (South Korea)
Hyung Jae Lee, Korea Advanced Institute of Science and Technology (South Korea)
Sang-Yoon Yi, Korea Advanced Institute of Science and Technology (South Korea)
Sang-Yung Shin, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 1374:
Integrated Optics and Optoelectronics II
Ka Kha Wong, Editor(s)

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