Share Email Print
cover

Proceedings Paper

Applications of laser vibrometer in vibration measurement of microstructures
Author(s): Jia Wang; Enyao Zhang
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The micro- and nano-science and technology has been developing in recent years. Employing the state-of-the-art manufacturing technology the sizes of microstructures are generally in micrometer scale or even in nanometer scale. This paper describes several vibration measurements in microstructure investigations with a laser vibrometer. The microstructures are Si lever, cantilever and cantilever probe in the AFM. Dynamic characteristics of optical fiber building the distance regulation in the NSOM and of Si membrane excited with laser beam in single direction and double opposite direction in thermal sensors were investigated. The vibration curves and experimental results are given. Further possible vibration measurements in micromachine and nano-science and technology is discussed.

Paper Details

Date Published: 23 August 1996
PDF: 8 pages
Proc. SPIE 2868, Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (23 August 1996); doi: 10.1117/12.248654
Show Author Affiliations
Jia Wang, Tsinghua Univ. (China)
Enyao Zhang, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 2868:
Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

© SPIE. Terms of Use
Back to Top