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Proceedings Paper

Two-frequency laser interferometric path measuring system for extreme velocities with high accuracy
Author(s): Jochen Mueller; Matthias Chour
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Paper Abstract

A two-frequency laser interferometric path measuring system is introduced which has been developed especially for the precision rapid-positioning systems of micro lithographic large-scale instruments and for ultra-precision technology. The modulation frequency of 640 MHz, generated by a highly stabilized He-Ne-laser allows -- in combination with a novel HF signal processing method -- measuring velocities up to 6.4 m/s without 'loosing' even the least increment (10 nm). It is further metrological merit that the least increment is not generated by an additional NF interpolation -- as was usual so far -- but aries from the parallel processing in the HF part.

Paper Details

Date Published: 26 August 1996
PDF: 7 pages
Proc. SPIE 2787, Rapid Prototyping, (26 August 1996); doi: 10.1117/12.248592
Show Author Affiliations
Jochen Mueller, Carl Zeiss Jena GmbH (Germany)
Matthias Chour, Jenaer Messtechnik GmbH (Germany)


Published in SPIE Proceedings Vol. 2787:
Rapid Prototyping
Rolf-Juergen Ahlers; Gunther Reinhart, Editor(s)

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