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Proceedings Paper

Micro-optics for sensor applications
Author(s): Philippe Nussbaum; Reinhard Voelkel; Hans Peter Herzig; Rene Daendliker
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Paper Abstract

Our investigation is focused on microlens arrays for microsystems and sensor applications. Arrays of refractive lenses (2 micrometer to 5 mm lens diameter) have been fabricated by melting resist technology. Microlens arrays have been transferred in fused silica (reactive ion etching) and replicated in polycarbonate and polymer (embossing, casting). Lens arrays have been integrated into lithographic systems, sensors and neural networks.

Paper Details

Date Published: 26 August 1996
PDF: 9 pages
Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248510
Show Author Affiliations
Philippe Nussbaum, Univ. de Neuchatel (Switzerland)
Reinhard Voelkel, Univ. de Neuchatel (Switzerland)
Hans Peter Herzig, Univ. de Neuchatel (Switzerland)
Rene Daendliker, Univ. de Neuchatel (Switzerland)

Published in SPIE Proceedings Vol. 2783:
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
Olivier M. Parriaux, Editor(s)

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