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Proceedings Paper

New integrated optics displacement sensor in glass
Author(s): Thiemo Lang; Denis Genon-Catalot; Pascal Dandrea; Isabelle Schanen Duport; Pierre Benech
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Paper Abstract

In this paper we present an integrated optics displacement sensor with an interference head, where one-dimensional fringe pattern is created, allowing multiphase detection. Waveguides placed in the interference pattern are sampling four ideally pi/2 phase shifted signals. The four phase detection allows us to overcome the difficulties of intensity and contrast variation by suitable electronic treatment and offers potentially very high resolution displacement measurements. The interference fringe spacing and therefore equal phase shifts between the signals is controlled by the geometrical parameters of the mask design and therefore insensitive to fabrication tolerances.

Paper Details

Date Published: 26 August 1996
PDF: 12 pages
Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248503
Show Author Affiliations
Thiemo Lang, ENSERG/INPG (France)
Denis Genon-Catalot, ESISAR/INPG (France)
Pascal Dandrea, ENSERG/INPG (France)
Isabelle Schanen Duport, ENSERG/INPG (France)
Pierre Benech, ENSERG/INPG (France)

Published in SPIE Proceedings Vol. 2783:
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
Olivier M. Parriaux, Editor(s)

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