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Proceedings Paper

Feedback interferometry with semiconductor laser for high-resolution displacement sensing
Author(s): Silvano Donati; Sabina Merlo; Francesco Micolano
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Paper Abstract

We present the prototype of a laser feedback interferometer for displacement measurement with micrometric resolution and directional discrimination, which we propose for applications in industrial environment. The instrument incorporates a PC-interfaced electronic unit connected with the optical head, which is very compact thanks to the selected optical configuration and to the use of a semiconductor laser. Infrared as well as red emitting lasers have been used for operation on reflecting and diffusing targets.

Paper Details

Date Published: 26 August 1996
PDF: 8 pages
Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248490
Show Author Affiliations
Silvano Donati, Univ. degli Studi di Pavia (Italy)
Sabina Merlo, Univ. degli Studi di Pavia (Italy)
Francesco Micolano, Univ. degli Studi di Pavia (Italy)


Published in SPIE Proceedings Vol. 2783:
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
Olivier M. Parriaux, Editor(s)

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