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Proceedings Paper

High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode
Author(s): Pawel Drabarek; Michael van Keulen; Goetz Kuehnle; Siegbert Steinlechner
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Paper Abstract

A high-resolution interferometric rotation encoder has been developed and characterized. It is based on the principle of a heterodyne interferometer. The frequency shifting was done by modulation of the injection current of a laser diode and a fiber-optical delay line allowing a compact system design. Light wave aberrations produced by the scale (i.e. rotary grating disk) are pre-corrected by using computer-generated holograms (CGH). Combined analogue and digital signal processing allow high resolution as well as high measurement rates. The designed prototype yields a resolution of 0.03 arcsec (i.e. 25 bit) corresponding to 3 nm resolution of displacement of the 38 mm diameter disk-scale. The measuring rate of 1 MHz allows a rotation speed resolution of 0.013 rpm at a maximum speed of 300 rpm.

Paper Details

Date Published: 26 August 1996
PDF: 11 pages
Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248489
Show Author Affiliations
Pawel Drabarek, Robert Bosch GmbH (Germany)
Michael van Keulen, Robert Bosch GmbH (Germany)
Goetz Kuehnle, Robert Bosch GmbH (Germany)
Siegbert Steinlechner, Robert Bosch GmbH (Germany)


Published in SPIE Proceedings Vol. 2783:
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
Olivier M. Parriaux, Editor(s)

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