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Proceedings Paper

Microactuator for microwave antennas
Author(s): Dominique Chauvel; Dominique Collard; Hiroyuki Fujita
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Paper Abstract

Our main research topic is the integration of micromechanics and micro electronics to perform new kinds of microwave device functions. We presently focus our work on the realization of microwave antennas, which can be tilted mechanically to perform the spatial scanning of the emitted microwave beam. We present in this paper the mechanical part of the device: the tilting support on which microwave antenna has to be patterned. This mechanical support is a fused quartz plate metallized on both its faces, suspended by two thin torsion hinges and electrostatically driven by two fixed electrodes. Deflexion angles of 10 degrees may be obtained with voltage under 100 V.

Paper Details

Date Published: 26 August 1996
PDF: 9 pages
Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248486
Show Author Affiliations
Dominique Chauvel, Univ. of Tokyo (Japan)
Dominique Collard, Univ. of Tokyo (Japan)
Hiroyuki Fujita, Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 2783:
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
Olivier M. Parriaux, Editor(s)

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