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Proceedings Paper

Micro-optical beam deflectors and modulators: present state of development
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Paper Abstract

The utilization of micro-optical components in systems for optical beam deflection and modulation offers the possibility for realization of miniaturized switches and scanners. As the required displacement of the micro-optical components for efficient beam manipulation is quite small, high speed actuators with small electrical power consumption can be used. We present a variety of micro-optical configurations and discuss their potential for the creation of different types of miniaturized scanners, switches and modulators. First experimental results and even prototypes of modulators and switches have been achieved, indicating that the combination of micro-optical components already available and semiclassical piezoelectric actuators leads to new types of switching and modulation systems for a very broad spectrum of applications.

Paper Details

Date Published: 26 August 1996
PDF: 9 pages
Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248484
Show Author Affiliations
Rolf Goering, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Steffen Gloeckner, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)


Published in SPIE Proceedings Vol. 2783:
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
Olivier M. Parriaux, Editor(s)

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