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Proceedings Paper

Ellipsometric analysis of quasirugate films: regularization technique revisited
Author(s): Jiri Hrdina; Jaroslav Sobota; Vratislav Perina
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Paper Abstract

Analysis of refractive index profiles of rugate and quasi- rugate films from measurements requires special techniques to avoid destabilization of solution due to a large number of fitted parameters. Regularization technique suggested recently takes into account a priori information about the index profile by adding the so called stabilizing operator to the merit function. We propose a more general form of this operator and different model of the system thus allowing for better correspondence between the stabilizer and a priori information. The new technique is demonstrated on the analysis of rf magnetron sputtered quasi-rugate films of SiO2/TiO2 with nominally linear material composition profiles and the results are compared to profiles established from Rutherford backscattering spectroscopy measurements.

Paper Details

Date Published: 19 August 1996
PDF: 8 pages
Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); doi: 10.1117/12.246828
Show Author Affiliations
Jiri Hrdina, Institute of Physics (Czech Republic)
Jaroslav Sobota, Institute of Scientific Instruments (Czech Republic)
Vratislav Perina, Institute of Nuclear Physics (Czech Republic)


Published in SPIE Proceedings Vol. 2776:
Developments in Optical Component Coatings
Ian Reid, Editor(s)

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