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Proceedings Paper

Microstructured multilayer dielectric coatings with binary optical functions
Author(s): Marcus Frank; Uwe B. Schallenberg; Norbert Kaiser
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Paper Abstract

Micropatterned interference filters have been developed by dry etching of dielectric multilayer stacks. Apart from the optical demands on the conventional filter design there are new requirements originating from the patterning process, which has to be stopped at the interface between two layers. In this paper the fundamental problems associated with the design and the development of micropatterned multilayer dielectric stacks are discussed. Details of the production of a two-stage filter array are described and experimental results are presented.

Paper Details

Date Published: 19 August 1996
PDF: 6 pages
Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); doi: 10.1117/12.246819
Show Author Affiliations
Marcus Frank, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Uwe B. Schallenberg, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

Published in SPIE Proceedings Vol. 2776:
Developments in Optical Component Coatings
Ian Reid, Editor(s)

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