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Proceedings Paper

Study of thin film inhomogeneity with a fast-scanning acousto-optic spectrophotometer
Author(s): Alexander V. Tikhonravov; Michael K. Trubetskov; Andrew N. Tikhonov; Oleg B. Tcherednichenko; Boris G. Lysoi; Ksenia V. Mikhailova; Brian Thomas Sullivan; Jerzy A. Dobrowolski
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Paper Abstract

A novel device, the fast-scanning acousto-optic spectrophotometer, was used to measure the in situ reflectance of a thin film during deposition. The reflectance data, which was measured at different film thicknesses and over a wavelength region from 400 to 1100 nm, was used to study the refractive index profile of inhomogeneous ZrO2 films. This data was subsequently analyzed using a homogeneous thin film model to derive an 'effective' refractive index profile.

Paper Details

Date Published: 19 August 1996
PDF: 10 pages
Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); doi: 10.1117/12.246817
Show Author Affiliations
Alexander V. Tikhonravov, Moscow State Univ. (Russia)
Michael K. Trubetskov, Moscow State Univ. (Russia)
Andrew N. Tikhonov, Moscow State Univ. (Russia)
Oleg B. Tcherednichenko, POLYUS Research & Development Institute (Russia)
Boris G. Lysoi, POLYUS Research & Development Institute (Russia)
Ksenia V. Mikhailova, POLYUS Research & Development Institute (Russia)
Brian Thomas Sullivan, National Research Council Canada (Canada)
Jerzy A. Dobrowolski, National Research Council Canada (Canada)

Published in SPIE Proceedings Vol. 2776:
Developments in Optical Component Coatings
Ian Reid, Editor(s)

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