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Proceedings Paper

Design and fabrication of high-efficiency inclined binary high-frequency gratings
Author(s): Nicole De Beaucoudrey; J. Michael Miller; Pierre H. Chavel; Jari Pekka Turunen
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Paper Abstract

In the conception of a planar optical backplane interconnecting comprising of a uniform power distribution, we proposed to use cascaded high frequency diffractive optical elements, each with a different diffraction efficiency in the + 1 transmitted order. We introduced a new type of binary grating: the side walls are inclined angle. The gratings were optimized with a rigorous coupled wave algorithm, Here, we investigate various etching techniques in order to realize such slanted structures in fused silica. These methods include both ion beam milling and reactive sputter etching and their variants.

Paper Details

Date Published: 19 August 1996
PDF: 5 pages
Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246789
Show Author Affiliations
Nicole De Beaucoudrey, Institut d'Optique Theorique et Appliquee (France)
J. Michael Miller, Institut d'Optique Theorique et Appliquee (France)
Pierre H. Chavel, Institut d'Optique Theorique et Appliquee (France)
Jari Pekka Turunen, Univ. of Joensuu (Finland)


Published in SPIE Proceedings Vol. 2775:
Specification, Production, and Testing of Optical Components and Systems
Anthony E. Gee; Jean-Francois Houee, Editor(s)

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