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Proceedings Paper

Use of power spectral density (PSD) to specify optical surfaces
Author(s): Helmut H. Toebben; Gabriele A. Ringel; Frank Kratz; Dirk-Roger Schmitt
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Paper Abstract

The power spectral density (PSD) is the most appropriate way to characterize the microroughness of a surface with a spatial wavelength range from several centimeters to a few hundred nanometers. Novel concepts to specify optical surfaces using the PSD are discussed. The results are applied to measurements obtained by a n optical heterodyne profilometer, by a mechanical profiler nanostep, and by an atomic force microscope. It is demonstrated that this method could yield a bandwidth independent model for the description of surface parameters.

Paper Details

Date Published: 19 August 1996
PDF: 11 pages
Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246751
Show Author Affiliations
Helmut H. Toebben, DLR (Germany)
Gabriele A. Ringel, DLR (Germany)
Frank Kratz, DLR (Germany)
Dirk-Roger Schmitt, DLR (Germany)


Published in SPIE Proceedings Vol. 2775:
Specification, Production, and Testing of Optical Components and Systems
Anthony E. Gee; Jean-Francois Houee, Editor(s)

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