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Proceedings Paper

Surface finish assessment of synthetic quartz glass
Author(s): Axel Kiesel; Angela Duparre; Manuela Haase; Frank Coriand; Horst Truckenbrodt
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Paper Abstract

Synthetic quartz glass surfaces have been examined after consecutive stages of the manufacturing process: cutting, flat honing, and polishing. Results are presented of microtopography investigations performed using several optical and non-optical methods such as optical and mechanical profilometry, atomic force microscopy, and integrated light scattering. Rms-roughness values have been determined for each step of the surface finishing process. Subsurface damage effects have been imaged by scanning electron microscopy.

Paper Details

Date Published: 19 August 1996
PDF: 8 pages
Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246743
Show Author Affiliations
Axel Kiesel, Frieberger Compound Materials GmbH (Germany)
Angela Duparre, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Manuela Haase, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Frank Coriand, SICO Jena GmbH Quarzschmelze (Germany)
Horst Truckenbrodt, Technische Univ. Ilmenau (Germany)


Published in SPIE Proceedings Vol. 2775:
Specification, Production, and Testing of Optical Components and Systems
Anthony E. Gee; Jean-Francois Houee, Editor(s)

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