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Proceedings Paper

Nanometric precision bidimensional optical flat testing
Author(s): Raymond Mercier; Michel Lamare; P. Picart; Jean-Paul Marioge
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Paper Abstract

Absolute optical flat testing using the classical three flat method poses repositioning problems and basically only yields one absolute diameter. Although not giving access tot he mean curvature, the method we propose only requires relative displacements and yields a 2D map of the departure of the flat to the best sphere. Simulations and experimental data have been achieved up to a 301 by 301 sampling, showing a repeatability in the neighborhood of 1 nm P-V.

Paper Details

Date Published: 19 August 1996
PDF: 7 pages
Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246741
Show Author Affiliations
Raymond Mercier, Univ. de Paris-Sud (France)
Michel Lamare, Univ. de Paris-Sud (France)
P. Picart, Univ. de Paris-Sud (France)
Jean-Paul Marioge, Univ. de Paris-Sud (France)

Published in SPIE Proceedings Vol. 2775:
Specification, Production, and Testing of Optical Components and Systems
Anthony E. Gee; Jean-Francois Houee, Editor(s)

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