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Proceedings Paper

Fine characterization of ITO layers by spectroscopic ellipsometry
Author(s): Pierre Boher; Christophe Defranoux; Jean-Philippe Piel; Jean-Louis P. Stehle; Y. Suzuki
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Paper Abstract

Indium tin oxide films (ITO) are characterized precisely by spectroscopic ellipsometry which determines not only the thickness of the layers but also the optical indices in a large spectral range. The quality of the ITO films is checked by the transparency of the layers in the visible range 0.4 to 0.6 micrometers . Indeed, target degradation is detected by the occurrence of an absorption band in this region. The electrical conductivity of the layer can also be deduced by the Drude model applied to the absorption in the infrared region. Moreover, spectroscopic ellipsometry can give all these information on all the surface of the panels, checking at the same time the homogeneity and the stability of the deposition process. Different experimental examples will be presented and discussed.

Paper Details

Date Published: 16 August 1996
PDF: 4 pages
Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); doi: 10.1117/12.246246
Show Author Affiliations
Pierre Boher, SOPRA SA (France)
Christophe Defranoux, SOPRA SA (France)
Jean-Philippe Piel, SOPRA SA (France)
Jean-Louis P. Stehle, SOPRA SA (France)
Y. Suzuki, SEIKA Sangio Corp. (Japan)


Published in SPIE Proceedings Vol. 2873:
International Symposium on Polarization Analysis and Applications to Device Technology
Toru Yoshizawa; Hideshi Yokota, Editor(s)

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