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Proceedings Paper

Optical properties of sol-gel Ba0.7Sr0.3 TiO3 thin films studied by spectroscopic ellipsometry
Author(s): Iwao Suzuki; Masaru Miyazaki; Tadashi Saitoh; Yi-Ming Xiong
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Paper Abstract

Spectroscopic ellipsometry (SE) was used to characterized sol-gel Ba0.7Sr0.3TiO3 (BST) thin films on Pt- coated Si. Four samples were investigated, each containing a sol-gel BST thin film with a nominal thickness of 200 nm deposited on Pt and annealed at 400, 500, 600 and 700 degree(s)C, respectively. In this study, our main objective was to determine the temperature-dependent optical properties of the BST thin films. In the analysis of the measured spectra, two fitting models were used, one containing a BST film and another containing a surface roughness layer and a BST film. The optical properties of BST film in both models were represented by a Cauchy's function. Our SE analysis clearly shows that the refractive index increases with the increase of the annealing temperature, which, we believe, is an indication of further crystallization of BST thin film. In addition, we also determined the BST film thickness for each sample and found it decreasing with the increase of the annealing temperature.

Paper Details

Date Published: 16 August 1996
PDF: 4 pages
Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); doi: 10.1117/12.246236
Show Author Affiliations
Iwao Suzuki, Tokyo Univ. of Agriculture and Technology (Japan)
Masaru Miyazaki, Hitashi, Ltd. (Japan)
Tadashi Saitoh, Tokyo Univ. of Agriculture and Technology (Japan)
Yi-Ming Xiong, Tokyo Univ. of Agriculture and Technology (Japan)


Published in SPIE Proceedings Vol. 2873:
International Symposium on Polarization Analysis and Applications to Device Technology
Toru Yoshizawa; Hideshi Yokota, Editor(s)

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