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Proceedings Paper

Spectroellipsometric study of amorphous thin films
Author(s): Tomuo Yamaguchi; Ahalapitiya Hewage Jayatissa; K. Kawanishi; M. Aoyama
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Paper Abstract

An empirical dielectric function has been proposed for amorphous materials. This function is based on the optical absorption in the inter band region and it follows the Kramers-Kronig dispersion relation of causality. The applicability of this dielectric function was demonstrated by analyzing spectroellipsometric measurements of several amorphous materials which has different band gaps and elements. According to the experimental results, this function is much suitable in the analysis of SE data of amorphous materials.

Paper Details

Date Published: 16 August 1996
PDF: 4 pages
Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); doi: 10.1117/12.246215
Show Author Affiliations
Tomuo Yamaguchi, Shizuoka Univ. (Japan)
Ahalapitiya Hewage Jayatissa, Shizuoka Univ. (Japan)
K. Kawanishi, Shizuoka Univ. (Japan)
M. Aoyama, Shizuoka Univ. (Japan)


Published in SPIE Proceedings Vol. 2873:
International Symposium on Polarization Analysis and Applications to Device Technology
Toru Yoshizawa; Hideshi Yokota, Editor(s)

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