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Proceedings Paper

Ellipsometric topometry for technical surfaces
Author(s): Wolfgang Holzapfel; Ulrich Neuschaefer-Rube; Jochen Doberitzsch
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Paper Abstract

In our contribution we describe a novel application of reflection ellipsometry to surface measurement. Not only the refractive index of the surface material but also the deterministic surface structure is concluded from the ellipsometric parameters (Delta) , (Psi) , and p. To achieve this, we here proposed two novel procedures: (1) the ellipsometric differential topometry and (2) the ellipsometric reference film method. The required measurement setup is described. To measure the ellipsometric parameters we developed a novel measurement procedure. Results of preliminary experiments are presented.

Paper Details

Date Published: 16 August 1996
PDF: 4 pages
Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); doi: 10.1117/12.246211
Show Author Affiliations
Wolfgang Holzapfel, Univ. of Kassel (Germany)
Ulrich Neuschaefer-Rube, Univ. of Kassel (Germany)
Jochen Doberitzsch, Univ. of Kassel (Germany)

Published in SPIE Proceedings Vol. 2873:
International Symposium on Polarization Analysis and Applications to Device Technology
Toru Yoshizawa; Hideshi Yokota, Editor(s)

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