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Proceedings Paper

Automated spectroscopic ellipsometry for characterization of complex multilayers for 550x650x0.7-mm LCD production control
Author(s): Dorian Zahorski; Jean-Louis P. Stehle; Jean-Philippe Piel; Jean Pierre Rey; L. Escadafals; Akira Iwasaki; Y. Kamiyama
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Paper Abstract

LCD production requires the deposition of complex multilayer systems on large area glass panels. The control of the different steps of the process must be made as accurately as possible not only in term of layer thickness but also in term of layer quality in some cases. The multilayer monitor especially developed by SOPRA for flat panel display (MLLM- FPDD) will be described in details in the proposed paper. The instrument is based on spectroscopic ellipsometry which is a non destructive technique. The rear face contribution is mechanically removed and no preparation of the screens is needed. We can determined not only the optical indices of the layers (scanning mode) but also can make rapidly mapping measurement on the entire surface of the panels to control the homogeneity of the layer and the run to run stability. Practical examples obtained in the field of LCD technology will be described and discussed including throughput for nine points and six parameters on patterned panels.

Paper Details

Date Published: 16 August 1996
PDF: 3 pages
Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); doi: 10.1117/12.246201
Show Author Affiliations
Dorian Zahorski, SOPRA SA (France)
Jean-Louis P. Stehle, SOPRA SA (France)
Jean-Philippe Piel, SOPRA SA (France)
Jean Pierre Rey, SOPRA SA (France)
L. Escadafals, SOPRA SA (France)
Akira Iwasaki, Seika Sangio Corp. (Japan)
Y. Kamiyama, Seika Sangio Corp. (Japan)

Published in SPIE Proceedings Vol. 2873:
International Symposium on Polarization Analysis and Applications to Device Technology
Toru Yoshizawa; Hideshi Yokota, Editor(s)

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