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Proceedings Paper

Birefringence-sensitive interference microscope
Author(s): Kallol Bhattacharya
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Paper Abstract

Measurement and analysis of birefringence distribution in samples such as silicon wafers, electro-optic crystals and some biological specimens often poses a challenging task. Most of the standard methods for photoelastic analysis are not exactly suited to testing of samples having microscopic dimensions. The present paper proposes an interference microscopic technique where, unlike conventional interference microscopy, both the interference beams are derived from the light transmitted through the sample. As a consequence of this, the surface finish of the sample need not be of the optical order and thickness variations in the sample are not reflected in the results.

Paper Details

Date Published: 16 August 1996
PDF: 4 pages
Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); doi: 10.1117/12.246187
Show Author Affiliations
Kallol Bhattacharya, Saha Institute of Nuclear Physics (India)


Published in SPIE Proceedings Vol. 2873:
International Symposium on Polarization Analysis and Applications to Device Technology
Toru Yoshizawa; Hideshi Yokota, Editor(s)

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