Share Email Print
cover

Proceedings Paper

Development of EUV free-standing multilayer polarizers
Author(s): Weibing Hu; Masaki Yamamoto; Makoto Watanabe
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Mo/Si transmission multilayers are studied theoretically for use as a polarizer at 80 eV. A multilayer of 99% polarization with a maximum transmittance of 8% was obtained by optimizing the thickness of Mo and Si. It is shown that the multilayer may be also used as a quarter-wave-plate. A new and reliable method of mounting free-standing multilayers is developed.

Paper Details

Date Published: 16 August 1996
PDF: 4 pages
Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); doi: 10.1117/12.246184
Show Author Affiliations
Weibing Hu, Tohoku Univ. (Japan)
Masaki Yamamoto, Tohoku Univ. (Japan)
Makoto Watanabe, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 2873:
International Symposium on Polarization Analysis and Applications to Device Technology
Toru Yoshizawa; Hideshi Yokota, Editor(s)

© SPIE. Terms of Use
Back to Top