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Proceedings Paper

Dynamic behavior of internal elements of high-frequency integrated circuits studied by time-resolved optical-beam-induced current (OBIC) method
Author(s): Harald Bergner; Klaus Hempel; Uwe Stamm
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Paper Abstract

A novel method for the optical testing of integrated circuits with ultrafast timeresolution and microscopic spatial resolution is described. The method is capable of detecting internal logical states switching speeds and propagation delays within complex integrated circuits as well as running times within single elements. In the experi ment a laser scanning microscope was combined with a cw modelocked argonion laser and an OBIC-stage. We achieved the complete mapping of the optical beam induced current signals in IC''s with a time resolu tion of about 100 picoseconds and a spatial resolution of less than

Paper Details

Date Published: 1 February 1991
PDF: 10 pages
Proc. SPIE 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications, (1 February 1991); doi: 10.1117/12.24560
Show Author Affiliations
Harald Bergner, Friedrich-Schiller-Univ. Jena (Germany)
Klaus Hempel, Friedrich-Schiller-Univ. Jena (Germany)
Uwe Stamm, Friedrich-Schiller-Univ. Jena (Germany)


Published in SPIE Proceedings Vol. 1362:
Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications
Manijeh Razeghi, Editor(s)

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