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Proceedings Paper

Application of phase-sensitive optical system for soft defect detection
Author(s): Tsuneyuki Hagiwara; Kouichirou Komatsu
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Paper Abstract

To attain a better yield, the performance requirements for the inspection equipment have been getting more rigid among mask manufacturers. Recently, we have developed the operational principle of the phase sensitive optical system based on the differential interference contrast (DIC) technique. This optical system has capability to suppress the circuit pattern images, and can enhance the contrast between the images of the contamination and the defect-less circuit patterns.

Paper Details

Date Published: 24 July 1996
PDF: 12 pages
Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); doi: 10.1117/12.245247
Show Author Affiliations
Tsuneyuki Hagiwara, Nikon Corp. (Japan)
Kouichirou Komatsu, Nikon Corp. (Japan)


Published in SPIE Proceedings Vol. 2793:
Photomask and X-Ray Mask Technology III
Hideo Yoshihara, Editor(s)

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