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Proceedings Paper

Diamond membrane for x-ray lithography
Author(s): Hitoshi Noguchi; Meguru Kashida; Yoshihiro Kubota; Takayuki Takarada
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Paper Abstract

Diamond membrane for X-ray lithography has been made by magnetically enhanced microwave chemical vapour deposition (CVD) technique, and evaluation of the membrane film has been carried out for various characteristics of X-ray mask requirements. Our diamond membrane has been found to have highly textured (1 1 1) poly crystalline with very little amount of non-diamond contents such as amorphous carbon and graphite, which suggests good mechanical strength, i.e., high durability against SR exposure with long lifetime and high Young's modulus required for accurate pattern positioning. We believe that our diamond membrane is suited for practical use in X-ray lithography.

Paper Details

Date Published: 24 July 1996
PDF: 5 pages
Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); doi: 10.1117/12.245216
Show Author Affiliations
Hitoshi Noguchi, Shin-Etsu Chemical Co., Ltd. (Japan)
Meguru Kashida, Shin-Etsu Chemical Co., Ltd. (Japan)
Yoshihiro Kubota, Shin-Etsu Chemical Co., Ltd. (Japan)
Takayuki Takarada, Gunma Univ. (Japan)

Published in SPIE Proceedings Vol. 2793:
Photomask and X-Ray Mask Technology III
Hideo Yoshihara, Editor(s)

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