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Proceedings Paper

PBS process optimization for bow-wake phenomena
Author(s): Do Yon Kim; Y. I. Lee; W. S. Kim
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Paper Abstract

We have performed a design experiments to optimize our PBS Process related to bow_wake problem with critical Poly,Metal layers. In pattern dependent geometry as like dog_bone pattern or along feature edge of large clear window (swelling), it happened bow_wake(call:dog bone) phenomena of feature distorted in PBS resist processing. We have investigated the effects of independent factors as like resist thickness, high dose, developer concentration, process factors(bias, exhaust, humidity, flow), post overlapping step optimization, media dispense method through binary or uniary(flat fan spray) nozzle(Developer system A, B, C,). Finally, We have concluded that the bow_wake problems were related to the developer media dispense way by chemical dispense method (uniary, binary), media supply differences(pump, air pressured) and process optimization.

Paper Details

Date Published: 24 July 1996
PDF: 8 pages
Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); doi: 10.1117/12.245206
Show Author Affiliations
Do Yon Kim, DuPont Korea Ltd. (South Korea)
Y. I. Lee, DuPont Korea Ltd. (South Korea)
W. S. Kim, DuPont Korea Ltd. (South Korea)

Published in SPIE Proceedings Vol. 2793:
Photomask and X-Ray Mask Technology III
Hideo Yoshihara, Editor(s)

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