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Proceedings Paper

New type of common-path heterodyne profilometer
Author(s): Jinjin Li; Yang Zhao; Dacheng Li
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Paper Abstract

A new type of non-contact heterodyne profilometer with annular lens is described in this paper. The surface can be measured without the separated reference surface. The theoretical lateral resolution of this system becomes much higher of 1 m. The optical structure is easy to set up.

Paper Details

Date Published: 19 July 1996
PDF: 3 pages
Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); doi: 10.1117/12.245176
Show Author Affiliations
Jinjin Li, Tsinghua Univ. (China)
Yang Zhao, Tsinghua Univ. (United States)
Dacheng Li, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 2861:
Laser Interferometry VIII: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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