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Proceedings Paper

Multiaperture overlap-scanning technique for moire metrology
Author(s): Mingyi Chen; De-zhu Wu
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Paper Abstract

In moire technique there are some inherent drawbacks such as: inevitable shadow in illumination and readout, limited depth and size of measurement which obstruct its further application in topographic measurement of large object, especially with complicated shape. Our studies show that the multi-aperture overlap-scanning techniques can also be applied to moire method. Therefore, not only all these drawbacks can be removed, the problem sensitive to eccentric positioning of object and axis swing of the turntable in 360 degree(s) profilometry can also be overcome. In this paper the mathematical model for Moire pattern transformation and connection is described, and results of simulation tests are presented.

Paper Details

Date Published: 19 July 1996
PDF: 6 pages
Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); doi: 10.1117/12.245156
Show Author Affiliations
Mingyi Chen, Shanghai Univ. (China)
De-zhu Wu, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 2861:
Laser Interferometry VIII: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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