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Proceedings Paper

Phase-shifting techniques applied to unique applications
Author(s): Chris L. Koliopoulos
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Paper Abstract

The methods of phase shifting interferometry have been applied to a number of unique optical metrology instruments which demonstrates the power of phase detection.

Paper Details

Date Published: 19 July 1996
PDF: 8 pages
Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); doi: 10.1117/12.245154
Show Author Affiliations
Chris L. Koliopoulos, Phase Shift Technology, Inc. (United States)


Published in SPIE Proceedings Vol. 2861:
Laser Interferometry VIII: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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