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Proceedings Paper

X-ray interferometry technique for mirror and multilayer characterization
Author(s): Igor A. Schelokov; Olivier Hignette; Carsten Raven; Anatoly A. Snigirev; Irina Snigireva; Alexey Suvorov
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Paper Abstract

X-ray beams delivered by third generation synchrotron radiation machines have a high degree of coherence that allows to use different coherent imaging techniques such as phase contrast microscopy, holography, and phase-contrast tomography in the high-energy domain. The question arises to what extent the existing optical elements such as mirrors and multilayers are capable of preserving this high spatial coherence. A theory of partially coherent x-ray scattering by a slightly modulated mirror surface under total reflection is developed. This gives estimations for intensity contrast as a function of the surface modulation. X-ray topography with coherent light is proposed and applied for mirror diagnostics. X-ray interferometry in an in-line holography setup is used to describe the coherence properties of the x-ray beam including optical components like mirror and multilayers. It is shown that significant improvements of the polishing process are still needed for the long mirrors while small state-of-the-art mirrors (less than 100 nm) are nearly adequate.

Paper Details

Date Published: 19 July 1996
PDF: 11 pages
Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); doi: 10.1117/12.245104
Show Author Affiliations
Igor A. Schelokov, Institute of Microelectronics Technology (Russia)
Olivier Hignette, European Synchrotron Radiation Facility (France)
Carsten Raven, European Synchrotron Radiation Facility (France)
Anatoly A. Snigirev, European Synchrotron Radiation Facility (France)
Irina Snigireva, European Synchrotron Radiation Facility (France)
Alexey Suvorov, European Synchrotron Radiation Facility (France)

Published in SPIE Proceedings Vol. 2805:
Multilayer and Grazing Incidence X-Ray/EUV Optics III
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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