Share Email Print
cover

Proceedings Paper

Penta-Prism Long Trace Profiler (PPLTP) for measurement of grazing incidence space optics
Author(s): Shinan Qian; Haizhang Li; Peter Z. Takacs
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The long trace profiler (LTP) is in use at a number of locations throughout the world for the measurement of the figure and mid-frequency roughness of x-ray mirrors. The standard configuration requires that the surface tested lie in a horizontal plane as the optical head is scanned along a horizontal line. For applications where gravity-induced sag of the surface cannot be tolerated, such as in x-ray telescope mirror metrology, it is desirable to measure the mirror as it is mounted in a vertical configuration. By making simple modifications to the standard LTP system, we have demonstrated that it is possible to use the LTP principle to measure the surface of x-ray mirrors and mandrels mounted in the vertical orientation. The major change in the LTP system is the use of a penta prism on a vertical translation stage to direct the probe beam onto the surface and the addition of a precision rotation stage to hold the test object. A 3D map of the surface topography of the complete cylindrical asphere can be generated quite easily with this technique. Measurements with a prototype system indicate a slope error accuracy of better than 1 microradian is possible, with a figure error repeatability of better than 50 nm.

Paper Details

Date Published: 19 July 1996
PDF: 7 pages
Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); doi: 10.1117/12.245083
Show Author Affiliations
Shinan Qian, Sincrotrone Trieste (United States)
Haizhang Li, Continental Optical Corp. (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)


Published in SPIE Proceedings Vol. 2805:
Multilayer and Grazing Incidence X-Ray/EUV Optics III
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

© SPIE. Terms of Use
Back to Top