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Proceedings Paper

Role of sampling errors in the specification of x-ray mirror surfaces
Author(s): Eugene L. Church; Peter Z. Takacs
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Paper Abstract

The effects of topographic finish errors on the quality of the image formed by a simple focusing mirror and the performance of different laboratory roughness-measuring instruments can be described in terms of a common formalism involving statistical operators or 'estimators'. In effect, conventional finish specifications and the test measurements used to ensure compliance with them, are stated in terms of the average values of these estimators. Int his paper we calculate correction factors to be applied to such average- based specifications and test measurements to account for the fluctuation effects inherent in the statistical nature of the processes considered.

Paper Details

Date Published: 19 July 1996
PDF: 8 pages
Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); doi: 10.1117/12.245081
Show Author Affiliations
Eugene L. Church, Brookhaven National Lab. (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)

Published in SPIE Proceedings Vol. 2805:
Multilayer and Grazing Incidence X-Ray/EUV Optics III
Richard B. Hoover; Arthur B. C. Walker II, Editor(s)

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