Share Email Print
cover

Proceedings Paper

Nondestructive investigations of multilayer dielectrical coatings
Author(s): Alexander G. Shapiro; Igor V. Yaminsky
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The paper presents an approach to the nondestructive ellipsometric investigation and computer simulation of dielectric structures with known thicknesses. Three-dimensional profile studies of surface microrelief using an atomic force microscope are also considered. The proposed approach enables the examination of an optical waveguide''s sections and permits investigations of interferometric coatings and the numerical analysis of various multilayer dielectric systems.

Paper Details

Date Published: 1 February 1991
PDF: 10 pages
Proc. SPIE 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications, (1 February 1991); doi: 10.1117/12.24473
Show Author Affiliations
Alexander G. Shapiro, Moscow Aircraft Technology Institute (Russia)
Igor V. Yaminsky, Soviet-West German Joint Venture--UNITECH (Russia)


Published in SPIE Proceedings Vol. 1362:
Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications
Manijeh Razeghi, Editor(s)

© SPIE. Terms of Use
Back to Top