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Proceedings Paper

Epitaxial growth of gallium arsenide from elemental arsenic
Author(s): Ting L. Chu; Shirley S. Chu; Richard F. Green; C. L. A. Cerny
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Paper Abstract

Epitaxial gallium arsenide (GaAs) films of controlled electrical properties are essential for the fabrication of high performance devices. Metalorganic vapor phase epitaxy (MOVPE) utilizing the reaction of trimethylgallium (TMGa) or triethylgallium (TEGa) and arsine (AsH3) is commonly used for the epitaxial growth of GaAs. The use of highly toxic AsH3 however is a serious hazard in research and manufacturing operations. In this work the MOVPE of device quality GaAs from elemental arsenic has been demonstrated for the first time thus minimizing a major safety concern. The reaction of TEGa and As on the substrate surface at 450-550C in a H2 flow was used. The parameter of the growth process and the electrical and photoluminescent properties of epitaxial GaAs are discussed. Further TMGa TEGa and arsenic show strong absorption in far ultraviolet. The epitaxial growth of GaAs films can be achieved at low substrate temperatures by irradiating the gaseous reactant with a UV laser. Epitaxial GaAs films have been grown at 425C or higher by using ArF laser enhanced reaction of TEG and As. The electrical and photoluminescent properties of these films have also beencharacterized. Epitaxial GaAs films grown by the laser enhanced process have been found to contain considerably higher carbon concentration than films grown by the thermal process. This is due presumably to the photodissociation of carbon-hydrogen bonds in TEGa.

Paper Details

Date Published: 1 March 1991
PDF: 6 pages
Proc. SPIE 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization, (1 March 1991); doi: 10.1117/12.24416
Show Author Affiliations
Ting L. Chu, Univ. of South Florida (United States)
Shirley S. Chu, Univ. of South Florida (United States)
Richard F. Green, Univ. of South Florida (United States)
C. L. A. Cerny, Univ. of South Florida (United States)


Published in SPIE Proceedings Vol. 1361:
Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization
Manijeh Razeghi, Editor(s)

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