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Proceedings Paper

Micromachined uncooled VO2-based IR bolometer arrays
Author(s): Hubert Jerominek; Francis Picard; Nicholas R. Swart; Martin Renaud; Marc Levesque; Mario Lehoux; Jean-Sebastien Castonguay; Martin Pelletier; Ghislain Bilodeau; Danick Audet; Timothy D. Pope; Philippe Lambert
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Paper Abstract

Bulk silicon micromachined IR bolometer detectors operating at room temperature are presented. These devices are based on VO2 films typically exhibiting a thermal coefficient of resistance of the order of -3%/ degree(s)C. Detector sizes are 50 micrometers X 50 micrometers and 100 micrometers X 100 micrometers , and they are arranged in 1 X 64, 1 X 128 and 1 X 256 pixel linear arrays. A test bench for detector performance evaluation is described. The fabricated detectors exhibit responsivities of up to approximately 20,000 V/W, normalized detectivities typically exceeding 108 cmHz1/2 W-1, and response times typically below 20 ms, At 300 K and a frequency of 30 Hz, the noise equivalent temperature difference for these detectors is of the order of 3 X 10-2 degree(s)C. A bolometer simulation tool is also briefly described.

Paper Details

Date Published: 17 June 1996
PDF: 12 pages
Proc. SPIE 2746, Infrared Detectors and Focal Plane Arrays IV, (17 June 1996); doi: 10.1117/12.243056
Show Author Affiliations
Hubert Jerominek, National Optics Institute (Canada)
Francis Picard, National Optics Institute (Canada)
Nicholas R. Swart, National Optics Institute (Canada)
Martin Renaud, National Optics Institute (Canada)
Marc Levesque, National Optics Institute (Canada)
Mario Lehoux, National Optics Institute (Canada)
Jean-Sebastien Castonguay, National Optics Institute (Canada)
Martin Pelletier, National Optics Institute (Canada)
Ghislain Bilodeau, National Optics Institute (Canada)
Danick Audet, National Optics Institute (Canada)
Timothy D. Pope, National Optics Institute (Canada)
Philippe Lambert, National Optics Institute (Canada)

Published in SPIE Proceedings Vol. 2746:
Infrared Detectors and Focal Plane Arrays IV
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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