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Proceedings Paper

Producibility advances in hybrid uncooled infrared devices II
Author(s): Robert A. Owen; James F. Belcher; Howard R. Beratan; Steve N. Frank
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Paper Abstract

Producibility and factory improvements continue to advance the state-of-the-art in hybrid uncooled infrared detector manufacturing. The emphasis has shifted from proof-of- principle experiments to implementation and refinement in the areas of facilities, statistical process control, wafer level processing, and in the resolution of several key yield problems. Improvements in yield, throughput, and consistency demonstrate the maturation of Texas Instruments' detector factory from a research and development oriented lab to a production facility. Reliability and field testing are also confirming detector suitability to the market. The present discussion addresses these recent developments and their impact on the evolution toward a low cost, infrared detector.

Paper Details

Date Published: 17 June 1996
PDF: 12 pages
Proc. SPIE 2746, Infrared Detectors and Focal Plane Arrays IV, (17 June 1996); doi: 10.1117/12.243053
Show Author Affiliations
Robert A. Owen, Texas Instruments Inc. (United States)
James F. Belcher, Texas Instruments Inc. (United States)
Howard R. Beratan, Texas Instruments Inc. (United States)
Steve N. Frank, Texas Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 2746:
Infrared Detectors and Focal Plane Arrays IV
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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