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Proceedings Paper

Application of DNQ-based microlithography to patterning bioactive molecules and cells
Author(s): Dan V. Nicolau; Takahisa Taguchi; Hiroshi Taniguchi; Susumu Yoshikawa; Mircea V. Dusa
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Paper Abstract

Photochemically induced surface functionality manipulation of Diazo-Naphto-Quinone/novolak polymeric films was used for controlling the specificity of the attachment and growth of neuronal cells and biologically active molecules (proteins and peptides) patterning. Different microlithographic techniques (standard positive tone, negative tone image reversal based on catalyzed decarboxylation, positive tone of image reversal resist, and surface imaging based on silylation), controlling the surface hydrophobicity and surface concentration of carboxylic groups, were assessed in the view of the suitability as microlithographic techniques for patterning biologically active molecules and cells. It was found that DNQ-based materials and techniques can be easily transferred in bio-microlithography, which is the building of laterally ordered architectures with biological structural elements.

Paper Details

Date Published: 14 June 1996
PDF: 12 pages
Proc. SPIE 2724, Advances in Resist Technology and Processing XIII, (14 June 1996); doi: 10.1117/12.241848
Show Author Affiliations
Dan V. Nicolau, Osaka National Research Institute (Japan)
Takahisa Taguchi, Osaka National Research Institute (Japan)
Hiroshi Taniguchi, Osaka National Research Institute (Japan)
Susumu Yoshikawa, Osaka National Research Institute (Japan)
Mircea V. Dusa, National Semiconductor Corp. (United States)


Published in SPIE Proceedings Vol. 2724:
Advances in Resist Technology and Processing XIII
Roderick R. Kunz, Editor(s)

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