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Proceedings Paper

Fast-marching level-set methods for three-dimensional photolithography development
Author(s): James A. Sethian
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Paper Abstract

The fast marching method, introduced by Sethian, is a numerical technique for solving the Eikonal equation, and results from combining upwind schemes for viscosity solutions of Hamilton-Jacobi equations, narrow band level set methods, and a fast min-heap algorithm. On a rectangular grid of N total points, the fast marching level set method computes the solution to the Eikonal equation from given initial data in O(N log N) steps. In a series of papers, we have applied this technique to a wide collection of problems, including construction of geodesics on surfaces, computer vision, and shape-from-shading. In this paper, we analyze the application of the fast marching method to photolithography development.

Paper Details

Date Published: 7 June 1996
PDF: 11 pages
Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); doi: 10.1117/12.240962
Show Author Affiliations
James A. Sethian, Univ. of California/Berkeley and Lawrence Berkeley National Lab. (United States)

Published in SPIE Proceedings Vol. 2726:
Optical Microlithography IX
Gene E. Fuller, Editor(s)

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