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Proceedings Paper

Fabrication of 1D gratings on photoresist for light-scattering and memory-effect measurements
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Paper Abstract

An optical method of fabricating one- and two-dimensional diffraction gratings is described. As opposed to conventional gratings which feature regularly spaced grooves, these gratings have variable profiles which represent mathematical functions previously defined. These surface profiles are produced by a laser beam exposing photoresist-coated plates with a raster scanner under computer control. Two kinds of 1-D profiles for the gratings have been made: (1) Deterministic: the profile represents a mathematical function; and (2) Random: gratings possess random profile with certain statistical distributions. Several surfaces have been fabricated and characterized with a stylus profilometer. By changing surface deterministic and statistical properties, the light-scattering in the far-field can be controlled for many optical applications.

Paper Details

Date Published: 7 June 1996
PDF: 6 pages
Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); doi: 10.1117/12.240961
Show Author Affiliations
Zu-Han Gu, Surface Optics Corp. (United States)
Michel A. Josse, CEA/CESTA (France)

Published in SPIE Proceedings Vol. 2726:
Optical Microlithography IX
Gene E. Fuller, Editor(s)

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