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Proceedings Paper

Debrisless laser-produced x-ray source with a gas puff target
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Paper Abstract

A hot and dense plasma produced from a laser-irradiated gas puff target, created by pulsed injection of gas with a solenoid valve, offers the possibility to realize a debrisless x-ray point source for the x-ray lithography applications. This paper reports experimental investigations on the x-ray generation in 1-keV photon-energy range from a high-pressure gas puff xenon target irradiated with a laser pulse of 1-ns duration at intensities of about 1013 Wcm-2. X-ray output in this range for the gas puff xenon target, estimated from the measurements made using the semiconductor detectors, was higher than x-ray output for a solid tellurium or iron target measured for the same conditions.

Paper Details

Date Published: 27 May 1996
PDF: 7 pages
Proc. SPIE 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, (27 May 1996); doi: 10.1117/12.240482
Show Author Affiliations
Henryk Fiedorowicz, Military Univ. of Technology (Poland)
Andrzej Bartnik, Military Univ. of Technology (Poland)
Jerzy Kostecki, Military Univ. of Technology (Poland)
Miroslaw Szczurek, Military Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 2723:
Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI
David E. Seeger, Editor(s)

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