Share Email Print
cover

Proceedings Paper

Spherical pinch (soft x ray/EUV) and vacuum spark (soft x ray) for microlithography
Author(s): Liyan Zhang; Emilio Panarella; Mariusz Bielawski; Haibo Chen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Spherical pinch and vacuum spark have been pursued by Advanced Laser and Fusion Technology, Inc. for a number of years as candidates for point radiation source needed in microlithography. In the spherical pinch electrical energy is used to generate spherical imploding shock waves that compress a performed plasma into small (diameter < 1.0 mm) radiation source. The temperature of the central plasma can be high enough for emission of broadband radiation from the UV to the soft X-ray region of the spectrum. In the vacuum spark a small capacitor (a few nF) is discharged through two properly shaped electrodes in a vacuum. During the discharge 'hot spots' (minute high temperature plasmas) are formed in the vicinity of the anode and intense pulsed soft X-rays can be generated around the characteristic lines of the electrode materials. High rep-rate operation of the vacuum spark is necessary to provide sufficient dosage for microlithography.

Paper Details

Date Published: 27 May 1996
PDF: 10 pages
Proc. SPIE 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, (27 May 1996); doi: 10.1117/12.240479
Show Author Affiliations
Liyan Zhang, Advanced Laser and Fusion Technology, Inc. (Canada)
Emilio Panarella, Advanced Laser and Fusion Technology, Inc. (Canada)
Mariusz Bielawski, Advanced Laser and Fusion Technology, Inc. (Canada)
Haibo Chen, Advanced Laser and Fusion Technology, Inc. (Canada)


Published in SPIE Proceedings Vol. 2723:
Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI
David E. Seeger, Editor(s)

© SPIE. Terms of Use
Back to Top