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Proceedings Paper

Three-dimensional polymeric and ceramic MEMS and their applications
Author(s): Vijay K. Varadan; Vasundara V. Varadan; S. Motojima
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Paper Abstract

In this paper, polymeric 3D MEMS fabricated from UV curable conductive polymer by stereo lithography and ceramic 3D MEMS fabricated by CVD processes are presented. Particular attention is given to the fabrication of micro coil springs of moderate and high aspect ratios. Applications of such devices include drag control in aircraft, beam focusing and steering and electromagnetic shielding and absorption.

Paper Details

Date Published: 20 May 1996
PDF: 9 pages
Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240440
Show Author Affiliations
Vijay K. Varadan, The Pennsylvania State Univ. (United States)
Vasundara V. Varadan, The Pennsylvania State Univ. (United States)
S. Motojima, Gifu Univ. (Japan)


Published in SPIE Proceedings Vol. 2722:
Smart Structures and Materials 1996: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter, Editor(s)

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