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Proceedings Paper

Integrated force array: positioning drive applications
Author(s): Stephen M. Bobbio; Scott H. Goodwin-Johansson; Thomas D. DuBois; Farid M. Tranjan; Stephen W. Smith; Richard B. Fair; Christian Ball; James Jacobson; Charles Bartlett; Nadeem Eleyan; Hussein Makki; R. Gupta
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Paper Abstract

Integrated Force Arrays (IFAs) are thin film membrane actuators that act as transfer devices for electrostatic force. They are capable of large amplitude motion and evidence significant energies per unit volume (eg. 8.2 erg/mm3). Devices which use IFAs as drivers to scan PZT acoustic imaging transducers are under development and will be discussed here.

Paper Details

Date Published: 20 May 1996
PDF: 12 pages
Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240436
Show Author Affiliations
Stephen M. Bobbio, Univ. of North Carolina/Charlotte (United States)
Scott H. Goodwin-Johansson, Microelectronics Ctr. of North Carolina (United States)
Thomas D. DuBois, Univ. of North Carolina/Charlotte (United States)
Farid M. Tranjan, Univ. of North Carolina/Charlotte (United States)
Stephen W. Smith, Duke Univ. (United States)
Richard B. Fair, Duke Univ. (United States)
Christian Ball, Microelectronics Ctr. of North Carolina (United States)
James Jacobson, Microelectronics Ctr. of North Carolina (United States)
Charles Bartlett, Microelectronics Ctr. of North Carolina (United States)
Nadeem Eleyan, Univ. of North Carolina/Charlotte (United States)
Hussein Makki, Univ. of North Carolina/Charlotte (United States)
R. Gupta, Duke Univ. (United States)


Published in SPIE Proceedings Vol. 2722:
Smart Structures and Materials 1996: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter, Editor(s)

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