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Proceedings Paper

Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators
Author(s): James H. Smith; Richard Franklin Carson; Charles T. Sullivan; G. McClellan
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Paper Abstract

The integration of optical components with polysilicon surface micromechanical actuation mechanisms shows significant promise for signal switching, fiber alignment, and optical sensing applications. Monolithically integrating the manufacturing process for waveguide structures with the processing of polysilicon actuators allows actuated waveguides to take advantage of the economy of silicon manufacturing. The optical and stress properties of the oxides and nitrides considered for the waveguide design along with design, fabrication, and testing details for the polysilicon actuators are presented.

Paper Details

Date Published: 20 May 1996
PDF: 7 pages
Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240431
Show Author Affiliations
James H. Smith, Sandia National Labs. (United States)
Richard Franklin Carson, Sandia National Labs. (United States)
Charles T. Sullivan, Sandia National Labs. (United States)
G. McClellan, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 2722:
Smart Structures and Materials 1996: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter, Editor(s)

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