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Proceedings Paper

Integration of thin film electronics and MEMS
Author(s): Stephen J. Fonash
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Paper Abstract

The integration of thin film electronics and opto-electronics with MEMs is discussed. Thin film electronics and opto-electronics based on amorphous silicon or polycrystalline silicon are considered for integration with MEMs devices based on piezoelectric thin films or on amorphous or poly-Si thin films.

Paper Details

Date Published: 20 May 1996
PDF: 9 pages
Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); doi: 10.1117/12.240430
Show Author Affiliations
Stephen J. Fonash, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 2722:
Smart Structures and Materials 1996: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter, Editor(s)

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