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Proceedings Paper

Comprehensive characterization of micro-arcing related particles
Author(s): Yuri S. Uritsky; J. T. Pan; Terry Francis; C. R. Brundle
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Paper Details

Date Published: 27 May 1996
PDF: 2 pages
Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); doi: 10.1117/12.240417
Show Author Affiliations
Yuri S. Uritsky, Applied Materials, Inc. (United States)
J. T. Pan, Applied Materials, Inc. (United States)
Terry Francis, Applied Materials, Inc. (United States)
C. R. Brundle, Applied Materials, Inc. (United States)


Published in SPIE Proceedings Vol. 2714:
27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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