Share Email Print
cover

Proceedings Paper

248-nm laser interaction studies on MgF2/LaF3 optical coatings by mass spectroscopy and x-ray photoelectron spectroscopy
Author(s): Axel Bodemann; Norbert Kaiser; L. Raupach; Peter Weissbrodt; Erich J. Hacker
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A UHV surface analysis system combined with an optical setup was used in the present work to study the conditioning mechanism on MgF2?/LaF3 HR coatings at 248 nm excimer laser wavelength. During laser irradiation of the sample the laser-induced emission of contaminants and coating material from the sample surface was recorded by a quadrupole mass spectrometer. To analyze changes in composition and chemical bonds of the coating surface XPS-measurements were performed before, during and after irradiation in dependence on sample design, number of pulses and oxygen atmosphere.

Paper Details

Date Published: 27 May 1996
PDF: 11 pages
Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); doi: 10.1117/12.240361
Show Author Affiliations
Axel Bodemann, Fraunhofer Institut fuer Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer Institut fuer Angewandte Optik und Feinmechanik (Germany)
L. Raupach, JENOPTIK GmbH (Germany)
Peter Weissbrodt, JENOPTIK GmbH (Germany)
Erich J. Hacker, JENOPTIK GmbH (Germany)


Published in SPIE Proceedings Vol. 2714:
27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

© SPIE. Terms of Use
Back to Top